设计了基于Si3N4掩模的太阳电池选择性掺杂工艺, 并对其工艺参数进行了仿真优化。选择性掺杂电池的一次掺杂条件为仿真所得最佳非......

The dynamic analysis and optimal design of reactive extraction are challenging due to high nonlinearity of model equatio......